JR1000 Series UHP Ultra High Purity Single Stage Pressure Reducing Regulator And Low To Intermediate Flow

JR1000 Series
Single Stage Regulator
Low to intermediate flow

Features

■ Body material: SS 316L, SS 316L VAR.
■ Metal to metal diaphragm sealing.
■ Internal electrolytic polishing, with a smoothness of up to Ra 5 μin.
■ The internal volume is small.
■ The import pressure can reach 3500psig.
■ Flow coefficient Cv: 0.09 and 0.15.
■ Maximum flow rate, standard: 30 SLPM, high flow HF: 120 SLPM.
■ High cleanliness assembly and packaging are suitable for the the high-purity semiconductor industry.
■ Every product undergoes helium testing before leaving the factory.

Technical Data

Product Size
Dimensions, in millimeters, are for reference only and are subject to change.

Flow curve

Ordering Information

*The above are standard ordering specifications. If you need to order other specifications and models, please contact our sales personnel or agents.