High Pressure High Temperature Pneumatic Ultrahigh Purity Stainless Steel Diaphragm Valves

HD SERIES

HIGH PRESSURE PNEUMATIC DIAPHRAGM VALVE

Features
Body
*316L VIM-VAR stainless steel body material for ultrahigh-purity applications.
*The inner surface roughness can reach Ra 5 μin, and the flow channel can be completely cleaned.
1.minimizes entrapment areas.
2.facilitates purging.
3.maximizes flow capacity.

Diaphragm
*Hastelloy C-22 or cobalt-based superalloys (UNS R30003) material for strength and corrosion resistance.
*Optimal design for long cycle life.

Seat
*Fully contained PCTFE seat design provides:
1.excellent resistance to swelling and contamination.
2.improved helium leak test performance.
3.minimal particle generation.
4.long cycle life.
*High cleanliness assembly and packaging are are suitable for the high-purity semiconductor industry.
*Every product undergoes helium testing before leaving the factory.

Technical Data

Product Size
Dimensions, in millimeters, are for reference only and are subject to change.

Ordering Information

*The above are standard ordering specifications. If you need to order other specifications and models, please contact our sales personnel or agents.