High Purity Chemical Dispense System & Packing System For Semiconductors JW-200L-CDM & JW-1000L-CDM

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Technical Data

Model JW-200L-CDM,JW-1000L-CDM
Special gas cabinet size W2200*D1500*H2000(double drums)/W2990*D2100*H2000(double drums)
Control cabinet power supply 220VAC, 50HZ, 0.5~3KW, leakage protection
Purge PN2,SS316 1/2″SWG
Ultra-pure water UPW, JIS 16A bonding
Compressed air CDA,SS316 1/2″SWG
Waste outlet Drain,PP DN20 Fusion Socket/Drain,PP DN25 Fusion Socket
Standard equipment PP shell + transparent PVC observation window + PFA internal pipe valve, nitrogen purging, sampling, fully automatic acid supply, automatic switching of left and right barrels. The pump body has two uses and one backup. It can automatically switch the liquid supply operation according to the liquid level in the barrel. The touch screen can display the working status of each valve and the liquid supply status of the pipeline. Automatically cut off the fluid supply, early warning and alarm of the operating status of each part of the system, self-check and confirmation of multiple safety, simple system, and supports multiple languages, supports multiple signal inputs, code scanner, high-efficiency filter, door sensor Optional

*Emergency manual operation panel
*High efficiency filter
*Door sensor