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High Purity Chemical Dispense System & Packing System For Semiconductors JW-200L-CDM & JW-1000L-CDM
Technical Data
Model | JW-200L-CDM,JW-1000L-CDM |
Special gas cabinet size | W2200*D1500*H2000(double drums)/W2990*D2100*H2000(double drums) |
Control cabinet power supply | 220VAC, 50HZ, 0.5~3KW, leakage protection |
Purge | PN2,SS316 1/2″SWG |
Ultra-pure water | UPW, JIS 16A bonding |
Compressed air | CDA,SS316 1/2″SWG |
Waste outlet | Drain,PP DN20 Fusion Socket/Drain,PP DN25 Fusion Socket |
Standard equipment | PP shell + transparent PVC observation window + PFA internal pipe valve, nitrogen purging, sampling, fully automatic acid supply, automatic switching of left and right barrels. The pump body has two uses and one backup. It can automatically switch the liquid supply operation according to the liquid level in the barrel. The touch screen can display the working status of each valve and the liquid supply status of the pipeline. Automatically cut off the fluid supply, early warning and alarm of the operating status of each part of the system, self-check and confirmation of multiple safety, simple system, and supports multiple languages, supports multiple signal inputs, code scanner, high-efficiency filter, door sensor Optional |
*Emergency manual operation panel
*High efficiency filter
*Door sensor